Guest souiss Posted January 26, 2004 Share Posted January 26, 2004 Hi everyody, I intend to buy a pulsed laser depostion (PLD) setup to deposit thin ceramic films. By reading the litterature it seems that a lot of people use KrF lasers with a wavelength of 248nm. However using a solid-state Nd:YAG laser whose frequency is quadrupled (1064nm down to 266nm) seems to be also possible. What are the pros and the cons concerning the use of a KrF gas laser and a Nd:YAG solid-state laser to work around 250nm for deposition of thin oxide films? Thanks in advance for your help and for sharing your experience of PLD. Souiss Link to comment Share on other sites More sharing options...
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