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Electrochemical Etching of Silicon


ANI92

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I am trying to etch silicon on HF based electrolyte, I am using Gamry reference 3000, The script I am running is PWR-800 Galvanostatic-Stack cell. My connection seems fine, I am connecting greem-blue lead on one side and red-orange lead on the other side, black and white are connected to each other. It is showing CA overload , what should be done to make it run normal.

 

Earlier I was using Chronopotentiometry script and was connecting blue-green lead on one side and red-black on the other side. It was showing voltage and CA overload, to get rid of voltage overload I started using stack cell type in PWR 800 script.

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Your description is surprizing because the wires' colour is expected to change from one setup to the other.

 

In case you don't know exactly what you're doing, pease keep your hands off HF. This stuff is really bad for your flesh and bones.

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