fatin azura Posted April 19, 2019 Share Posted April 19, 2019 Currently, our company are going to built a mini sputtering system with a low cost. Our RF Sputtering having rotary pump only. We planned for not to use Turbo Molecular pump as it is more expensive. I need a suggestion on what are the suitable material deposition that I can use for our RF sputtering? Link to comment Share on other sites More sharing options...
swansont Posted April 19, 2019 Share Posted April 19, 2019 The choice of material depends on what you are trying to accomplish. Link to comment Share on other sites More sharing options...
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